TITLE

metrology

PUB. DATE
April 2016
SOURCE
Computer Desktop Encyclopedia;Apr2016, p1
SOURCE TYPE
Encyclopedia
DOC. TYPE
Reference Entry
ABSTRACT
The science of weights and measures. Metrology is an important part of semiconductor manufacturing where high-resolution tools are required to measure the tiny elements in a chip that continue to decrease year after year.
ACCESSION #
114226576

 

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