TITLE

Applied unveils wafer inspection tool for 45 nm immersion litho

AUTHOR(S)
Mutschler, Ann Steffora
PUB. DATE
December 2007
SOURCE
Electronic News;12/3/2007, Vol. 53 Issue 49, p5
SOURCE TYPE
Trade Publication
DOC. TYPE
Product Review
ABSTRACT
The article offers information on the UVision 3 deep ultraviolet (DUV) Brightfield wafer inspection tool from Applied Materials Inc.
ACCESSION #
27822342

 

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