TITLE

Post-litho pattern enhancement system

PUB. DATE
August 2007
SOURCE
Microlithography World;Aug2007, Vol. 16 Issue 3, p17
SOURCE TYPE
Trade Publication
DOC. TYPE
Product Review
ABSTRACT
The article introduces the 2300 Motif post-lithography pattern enhancement system from Lam Research Corp.
ACCESSION #
26363566

 

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