TITLE

AE offers remote plasma source

PUB. DATE
August 2004
SOURCE
Microlithography World;Aug2004, Vol. 13 Issue 3, p20
SOURCE TYPE
Trade Publication
DOC. TYPE
Product Review
ABSTRACT
Evaluates the Litmas RPS 1501 linear inductive remote plasma source from Advanced Energy Industries Inc. Applications of the remote plasma source; Features of the product.
ACCESSION #
14173901

 

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