Comment on “Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection” [Appl. Phys. Lett. 92, 183505 (2008)]

Fei Wang; Jiaying Chen; Xuezeng Zhao
September 2008
Applied Physics Letters;9/1/2008, Vol. 93 Issue 9, p096101
Academic Journal
The article presents a commentary on the paper "Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection," by Q. Zhu and colleagues. The authors' commentary focuses on the viscous damping effect of air on the vibration of a piezoelectric microcantilever (PEM), which is properly a reasonable explanation for the large frequency shift of a PEM during the humidity change than Young's modulus.


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