Response to “Comment on ‘Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection’ [Appl. Phys. Lett. 93, 096101 (2008)]”

Shih, Wan Y.; Wei-Heng Shih
September 2008
Applied Physics Letters;9/1/2008, Vol. 93 Issue 9, p096102
Academic Journal
The article presents a response to the commentary made by F. Wang and colleagues on the authors' paper "Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection." They stress that the argument of Wang on viscous damping effect contradicts with the observation that the resonance frequency increased as the humidity changed from 60% to 30%. They note that they have carefully examined a variety of possible interpretations for the data.


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