TITLE

Erratum: “Noble gas retention in the target during rotating cylindrical magnetron sputtering” [Appl. Phys. Lett. 93, 061501 (2008)]

AUTHOR(S)
Mahieu, S.; Leroy, W. P.; Depla, D.; Schreiber, S.; Möller, W.
PUB. DATE
February 2009
SOURCE
Applied Physics Letters;2/9/2009, Vol. 94 Issue 6, pN.PAG
SOURCE TYPE
Academic Journal
DOC. TYPE
Correction notice
ABSTRACT
A correction to the article "Noble gas retention in the target during rotating cylindrical magnetron sputtering," by S. Mahieu, W.P. Leroy and D. Depla is presented.
ACCESSION #
36609510

 

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