Detection of water-related charge in electronic dielectrics

Lifshitz, N.; Smolinsky, G.
July 1989
Applied Physics Letters;7/24/1989, Vol. 55 Issue 4, p408
Academic Journal
We observed an unusual behavior of low-temperature silicon dioxide based materials in the metal-oxide-semiconductor system. We used the triangular voltage sweep (TVS) technique to detect the motion of mobile charge in the dielectrics. The observed TVS spectra were different from those usually attributed to common contaminants in silicon dioxides, such as sodium. We came to the conclusion that these unusual TVS traces are due to the motion of protons formed through the electrical decomposition of water absorbed in these materials. The unique features of the water-related TVS traces may provide a method for detection of water-related instability in electronic dielectrics.


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