TITLE

Scanning capacitance microscopy on a 25 nm scale

AUTHOR(S)
Williams, C. C.; Hough, W. P.; Rishton, S. A.
PUB. DATE
July 1989
SOURCE
Applied Physics Letters;7/10/1989, Vol. 55 Issue 2, p203
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10-19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
ACCESSION #
9831896

 

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