TITLE

Gallium phosphide microlenses by mass transport

AUTHOR(S)
Liau, Z. L.; Diadiuk, V.; Walpole, J. N.; Mull, D. E.
PUB. DATE
July 1989
SOURCE
Applied Physics Letters;7/10/1989, Vol. 55 Issue 2, p97
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Arrays of high quality refractive microlenses have been formed in GaP substrates by mesa etching followed by a heat treatment in which the multistep mesas were smoothed due to surface energy minimization. A smooth lens surface and an accurately controlled lens profile have been obtained. Microlenses of 130 μm diameter and 200 μm focal length have been used to collimate the outputs of GaInAsP/InP and GaAs/GaAlAs diode lasers and have yielded a nearly diffraction-limited beam divergence of 0.68°.
ACCESSION #
9831886

 

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