TITLE

NbN/MgO/NbN edge-geometry tunnel junctions

AUTHOR(S)
Hunt, B. D.; LeDuc, H. G.; Cypher, S. R.; Stern, J. A.; Judas, A.
PUB. DATE
July 1989
SOURCE
Applied Physics Letters;7/3/1989, Vol. 55 Issue 1, p81
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We report the fabrication and low-frequency testing of the first edge-geometry NbN/MgO/NbN superconducting tunnel junctions. The use of an edge geometry allows very small junction areas to be obtained, while the all-NbN electrodes permit operation at 8–10 K with a potential maximum operating frequency above 1 THz. Edge definition in the base NbN film was accomplished utilizing Ar ion milling with an Al2O3 milling mask, followed by a lower energy ion cleaning step. This process has produced all-refractory-material tunnel junctions with areas as small as 0.1 μm2, resistance-area products less than 21 Ω μm2, and subgap to normal state resistance ratios larger than 18.
ACCESSION #
9831823

 

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