New high-efficiency quasi-continuous operation of a KrF(B→X) excimer lamp excited by microwave discharge

Kumagai, Hiroshi; Obara, Minoru
June 1989
Applied Physics Letters;6/26/1989, Vol. 54 Issue 26, p2619
Academic Journal
A quasi-continuous KrF(B→X) fluorescence of >8 ms pulse duration with 100 Hz operation frequency was observed in a microwave discharge-pumped KrF lamp. The average KrF fluorescence power was 53 W, obtained with an intrinsic efficiency of 8.3% with a 678 W average microwave power deposition. We also obtained a peak KrF fluorescence power of 120 W with a power efficiency of 12.1%.


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