Characterization of very thin Si oxynitride films produced by rapid thermal processing

Novkovski, N.; Aizenberg, I.; Goin, E.; Fullin, E.; Dutoit, M.
June 1989
Applied Physics Letters;6/12/1989, Vol. 54 Issue 24, p2408
Academic Journal
The electrical properties of thin films of SiO2 can be improved by nitridation and reoxidation. They are very sensitive to the nitrogen profile, as well as to other impurities, such as hydrogen or water, for example, which makes it necessary to carefully adjust processing parameters. The purpose of this work is to characterize very thin oxynitride films produced by rapid thermal processing (RTP) and to optimize their electrical properties in view of applying them in electrically erasable programmable read-only memories (EEPROMs). We propose a novel etch-back and test oxidation technique that is very sensitive to traces of nitrogen at the oxynitride/Si interface. We show a strong correlation between the oxidation resistance of the interface and the electrical properties of metal-oxide-silicon (MOS) capacitors fabricated with these films. Nitridation conditions that give a maximal resistance to oxidation (for example, 4 s at 1100 °C) also provide the lowest values of interface charges and traps after reoxidation. Using these processing parameters, we achieve a significant increase in charge to breakdown.


Related Articles

  • Lots of Lettering Options. Ruvo, Christopher // Stitches Magazine;Sep2011, Vol. 25 Issue 8, p32 

    The article provides an answer to a question of the meaning of heat transfers in the embroidery business.

  • Heat-transfer graphics make a mark in new durable... Sherman, Lilli Manolis // Plastics Technology;Apr97, Vol. 43 Issue 4, p23 

    Reports on the reaction of original equipment manufacturer (OEM) designers of consumer goods to heat-transfer graphics and the automated equipment used to apply them. Benefits of heat-transfer graphics; Advantages of using this decorating method over others; Comments from Eric Miles, director...

  • Not your father's thermography.  // American Printer;Jul98, Vol. 221 Issue 4, p22 

    Focuses on the growth of the thermography jobs of Anderberg-Lund. Function as a printer's printer; Usage of an SPE screen printer for bigger projects.

  • ThermaCAM SC2000.  // Environmental Engineering;Mar2000, Vol. 13 Issue 1, p43 

    Introduces the ThermaCAM SC2000 thermographic camera from FLIR Systems. Key features; Frame capacity; Applications in thermal analysis.

  • Thermographic measurement of in-plane diffusivity in very thin plates using diffusion of thermal patterns. Welch, Christopher; Johnson, Jane // AIP Conference Proceedings;2000, Vol. 509 Issue 1, p1449 

    We report a measurement of in-plane thermal diffusivity in very thin titanium samples. The measurement uses least squares analysis of radiatively imaged thermal patterns produced by heating samples through a patterned mask from the back side. Multiple flashes from a flash lamp through the mask...

  • Photothermal models for lock-in thermographic evaluation of plates with finite thickness under convection conditions. Bai, W.; Wong, B. S. // Journal of Applied Physics;3/15/2001, Vol. 89 Issue 6, p3275 

    Lock-in thermography is a technique which is increasingly being used for the evaluation of relatively thin materials such as composite materials in aircraft structures. In such cases, the models available in the literature cannot accurately predict the difference in phase values between...

  • Project strengthens galvanneal steel process. Chamberlain, Gary // Design News;4/7/97, Vol. 53 Issue 7, p9 

    Reports on the online tool of the American Iron and Steel Institute that accurately measures in-process galvanneal steel surface temperatures. Project as a joint research effort by Oak Ridge National Laboratory, 15 North American steelmakers and the Department of Energy; User of phosphor...

  • Santa graphics are heat-transferred to Coke bottles.  // Packaging Digest;Nov95, Vol. 32 Issue 15, p2 

    Describes Coca-Cola Co.'s holiday packaging design for its Coke Classic product. Decoration of nonreturnable glass contour bottles with `Santa' graphics; Shift from applied ceramic labeling to heat-transfer labels from Avery Dennison's Decorating Technologies Division; Designs chosen on...

  • Kodak Polychrome CTP among IFRA highlights.  // Seybold Report on Publishing Systems;10/18/99, Vol. 29 Issue 3, p37 

    Reports on Kodak Polychrome Graphics' CTP system and thermal plate for the newspaper market. Features of each; Capabilities; Price; Other Kodak products.


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics