Synthesis and properties of ultrafine AlN powder by rf plasma

Baba, Kazuhiro; Shohata, Nobuaki; Yonezawa, Masatomo
June 1989
Applied Physics Letters;6/5/1989, Vol. 54 Issue 23, p2309
Academic Journal
High-purity ultrafine AlN powder was synthesized by rf plasma through direct nitridation of Al. The specific surface area was about 30 m2 /g under typical experimental conditions. Ultrafine AlN powder showed excellent sinterability, compared with conventional AlN powders, whose particle sizes were more than 0.5 μm. The thermal conductivity for the sintered body reached 220 W/m K when sintered at 1900 °C, and 110 W/m K when sintered at 1400 °C, by using YF3 as a sintering aid.


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