TITLE

Synthesis and properties of ultrafine AlN powder by rf plasma

AUTHOR(S)
Baba, Kazuhiro; Shohata, Nobuaki; Yonezawa, Masatomo
PUB. DATE
June 1989
SOURCE
Applied Physics Letters;6/5/1989, Vol. 54 Issue 23, p2309
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
High-purity ultrafine AlN powder was synthesized by rf plasma through direct nitridation of Al. The specific surface area was about 30 m2 /g under typical experimental conditions. Ultrafine AlN powder showed excellent sinterability, compared with conventional AlN powders, whose particle sizes were more than 0.5 μm. The thermal conductivity for the sintered body reached 220 W/m K when sintered at 1900 °C, and 110 W/m K when sintered at 1400 °C, by using YF3 as a sintering aid.
ACCESSION #
9831464

 

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