TITLE

Laser fabricated GaAs waveguiding structures

AUTHOR(S)
Willner, A. E.; Ruberto, M. N.; Blumenthal, D. J.; Podlesnik, D. V.; Osgood, R. M.
PUB. DATE
May 1989
SOURCE
Applied Physics Letters;5/8/1989, Vol. 54 Issue 19, p1839
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have applied the technique of laser-induced etching to fabricate rib waveguides on a GaAs/AlGaAs heterostructure system. Light confinement of these guides was controlled by varying the depth of the etched trenches. Additionally, we have demonstrated directional couplers and two-level waveguides using the in situ depth control of this single-step process.
ACCESSION #
9831187

 

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