Modeling of a rf glow discharge plasma

Okazaki, Katsuji; Makabe, Toshiaki; Yamaguchi, Yukio
May 1989
Applied Physics Letters;5/1/1989, Vol. 54 Issue 18, p1742
Academic Journal
A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.


Related Articles

  • Linear Wave Interaction at the Charged Fluid�Fluid Interface under Tangential Discontinuity of the Velocity Field. Shiryaeva, S. O. // Technical Physics;Mar2001, Vol. 46 Issue 3, p280 

    Capillary wave flow in a two-layer fluid with the upper layer moving parallel to the charged interface at a constant velocity is treated within a linear mathematical model. Interaction between waves excited on the free surface of the upper layer and at the interface results not only in classical...

  • A Physical Model of the Short Glow Discharge in Plasma Display Panels. Kudryavtsev, A. A.; Tsendin, L. D. // Technical Physics Letters;Apr2001, Vol. 27 Issue 4, p284 

    It is shown that plasma display panel (PDP) cells are usually featuring a short glow discharge without positive column. An adequate description of this discharge must be consistently kinetic, taking into account the nonlocal effects for both fast and plasma electrons. Models combining elements...

  • Diffusive Decay of a Low-Pressure Electronegative Plasma. Bogdanov, E. A.; Kudryavtsev, A. A.; Tsendin, L. D. // Technical Physics Letters;May2001, Vol. 27 Issue 5, p373 

    The diffusion decay of a pulsed low-pressure discharge plasma in an electronegative gas is theoretically studied assuming the absence of plasmachemical processes. According to the previously established mechanisms, evolution of the plasma parameters involves two stages in which the variation of...

  • Glow Pause in a Helium Plasma at Room and Liquid Nitrogen Temperatures on Applying a Nanosecond Voltage Pulse to a Glow Discharge. Amirov, R. Kh.; Asinovskii, �. I.; Markovets, V. V. // Plasma Physics Reports;May2001, Vol. 27 Issue 5, p424 

    The features of the relaxation of a quasi-steady glow discharge after extra excitation by a nanosecond high-voltage pulse are studied experimentally. It is shown that the plasma relaxation is characterized by the existence of a time interval with a low emission intensity�a glow pause. A...

  • Glow discharge plasma switch controlled by a small magnetic field. Rocca, J.J.; Floyd, K. // Applied Physics Letters;8/24/1992, Vol. 61 Issue 8, p901 

    Presents a glow discharge plasma switch controlled by a small magnetic field. Properties determining the behavior of the discharge; Transition of a low pressure hollow cathode discharge; Effectiveness of the magnetic field in controlling the discharge impedance of the hollow cathode discharge...

  • Multiple double layers in a glow discharge. Conde, L.; Leon, L. // Physics of Plasmas;Aug94, Vol. 1 Issue 8, p2441 

    Reports on the formation of visible layered structures that develop at the anodic zone of a constricted glow discharge. Composition of the structures; Dependence of the number and size of plasma shells with the conditions of discharge; Effect of distribution of neutrals in the volume of the...

  • Closed form analytic solutions describing glow discharge plasma. Pai, S.T.; Guo, X.M.; Zhou, T.D. // Physics of Plasmas;Oct96, Vol. 3 Issue 10, p3842 

    Examines an analytic model for the description of DC glow discharge plasma. Closed form solutions from governing equations; Effects of discharge gap spacings or pressure on the maximum value in the electron density distribution moves toward the cathode; Positive column phenomenon in the...

  • Unstable Regime of the Excitation of Kinetic Striations in a Gas-Discharge Plasma. Solonin, V. V.; Stepanov, V. A.; Chirkin, M. V. // Technical Physics;Apr2000, Vol. 45 Issue 4, p519 

    Chaotic striations in a low-pressure discharge in the regime corresponding to an unstable periodic orbit singled out of a chaotic attractor are stabilized. A specific feature of the wave process in question is the change in the type of some striations in the course of their motion in the...

  • Generation of Homogeneous Plasma in a Low-Pressure Glow Discharge. Nikulin, S. P.; Kuleshov, S. V. // Technical Physics;Apr2000, Vol. 45 Issue 4, p400 

    The possibility of producing homogeneous plasma in a low-pressure discharge with the use of a hollow anode or hollow cathode is analyzed. It is shown that, in contrast to the high-pressure discharge, where uniform ionization is needed to produce homogeneous plasma, in the low-pressure discharge,...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics