Theory of the characteristic curves of the silver chalcogenide glass inorganic photoresists

Das, Amitabha; Al-Jishi, Radi
May 1989
Applied Physics Letters;5/1/1989, Vol. 54 Issue 18, p1745
Academic Journal
A theoretical model of the characteristic curves of the silver/chalcogenide glass inorganic photoresists, which is based explicitly on a photoinduced diffusion theory of the photodoping phenomenon, is presented. Besides the photoinduced diffusion of silver in the bulk glass, the role of the photoinduced reaction at the silver/glass interface through which silver gains entry into the glass is emphasized. It is proposed that the resists operate in the initial, interfacial reaction rate controlled regime of photodoping. Expressions for the sensitivity and the contrast parameter are derived.


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