Plastic analysis of cylinder oxidation

Rafferty, C. S.; Dutton, R. W.
May 1989
Applied Physics Letters;5/1/1989, Vol. 54 Issue 18, p1815
Academic Journal
A plastic flow model is used to calculate the stress generated during thermal oxidation of silicon cylinders. The analysis is used to estimate stress as a function of thickness, radius of curvature, and temperature. The oxidation stress is much lower than previous analyses.


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