Growth of regularly coiled spring-like fibers of Si3N4 by iron impurity-activated chemical vapor deposition

Motojima, Seiji; Ueno, Shuji; Hattori, Tatsuhiko; Goto, Keisuke
March 1989
Applied Physics Letters;3/13/1989, Vol. 54 Issue 11, p1001
Academic Journal
Very regularly coiled spring-like fibers of Si3N4 have been obtained from a gas mixture of Si2Cl6, NH3, and H2 at 1200 °C on a graphite substrate on which an iron impurity was painted. The spring-like fibers were amorphous Si3N4 with a circular cross section having a 0.5–1 μm thickness, 3–5 μm coil pitch, 10–15 μm coil diameter, and 50–100 μm coil length. The height of the bush of the fibers reached 1.5–2 mm after 30 min reaction time.


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