Nonaqueous chemical depth profiling of YBa2Cu3O7-x

Vasquez, R. P.; Foote, M. C.; Hunt, B. D.
March 1989
Applied Physics Letters;3/13/1989, Vol. 54 Issue 11, p1060
Academic Journal
A nonaqueous solution of Br in absolute ethanol (EtOH) has recently been reported [R. P. Vasquez, B. D. Hunt, and M. C. Foote, Appl. Phys. Lett. 53, 2692 (1988)] to be effective at removing nonsuperconducting surface species from YBa2 Cu3 O7-x films, leaving the surface close to the ideal stoichiometry. This same etchant is shown here to be an effective bulk etchant in chemical depth profiling through 1-μm-thick films. The Cu remains in the 2+oxidation state and the stoichiometry, as determined by x-ray photoelectron spectroscopy, is close to ideal and nearly constant throughout the profile, indicating the absence of any large preferential etching effects. The reaction of YBa2 Cu3 O7-x films with HF/EtOH, HCl/ EtOH, and I/EtOH solutions is also reported.


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