TITLE

Effect of SiO2 surface chemistry on the oxidation of silicon

AUTHOR(S)
deLarios, J. M.; Kao, D. B.; Helms, C. R.; Deal, B. E.
PUB. DATE
February 1989
SOURCE
Applied Physics Letters;2/20/1989, Vol. 54 Issue 8, p715
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We show that the retardation in the silicon oxidation rate associated with an ammonium hydroxide-hydrogen peroxide preclean is due to trace amounts of aluminum in the region of the SiO2 surface. This aluminum and the retarding effect can be eliminated by removing less than 50 Ã… of thermal oxide in a HF:H2O etch. Depositing thin films of aluminum with thicknesses between 0.05 and 1 monolayers (ML) on HF cleaned surfaces produced the same retardation as the NH4OH based cleans. These results indicate the importance of the SiO2 surface in silicon oxidation.
ACCESSION #
9830057

 

Related Articles

  • Lead uptake by new silica-carbon nanoparticles. Hammud, Hassan Hasan; Chahine, Mayssam Mostafa; Hamaoui, Bassem El; Younes Hanifehpour // European Journal of Chemistry;Dec2013, Vol. 4 Issue 4, p425 

    Silica-carbon nanoparticles (SCNP) were prepared from sonication of silica and anthracene. The size of homogenous nanoparticle is around 5-20nm confirmed by Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM). SEM analysis indicated surface porosity. SCNP were used to...

  • Highly active mesoporous SiO2-TiO2 based nanocomposites for photocatalytic degradation of textile dyes and phenol. Siddiqa, Asima; Sabir, Sumbul; Hussain, Syed Tajammul; Muhammad, Bakhtiar // European Journal of Chemistry;Dec2013, Vol. 4 Issue 4, p388 

    Titania-silica nanocomposites (20% SiO2-TiO2, 30% SiO2-TiO2, 40% SiO2-TiO2 and 50 % SiO2- TiO2) with tailored morphology and tunable band energy have been synthesized successfully via micro emulsion method. The morphology, chemical composition, band gap energy and stability of prepared...

  • SYNTHESIS AND CHARACTERISATION OF SiO2/POSS HYBRID SYSTEMS OBTAINED USING THE MECHANICAL METHOD. Szwarc, Karolina; Siwinska-Stefanska, Katarzyna; Marciniec, Bogdan; Jesionowski, Teofil // Physicochemical Problems of Mineral Processing;Jan2012, Vol. 48 Issue 1, p181 

    Hybrid systems of silica and polyhedral oligomeric silsesquioxanes (SiO2/POSS) were obtained by the mechanical method with the use of spherical or hydrated silicas, precipitated in the emulsion or aqueous environment. The SiO2 surface was modified with the following cage silsesquioxanes:...

  • New methods for using the Q-V technique to evaluate Si-SiO2 interface states. Lin, Ta Cheng; Young, Donald R. // Journal of Applied Physics;4/15/1992, Vol. 71 Issue 8, p3889 

    Proposes methods for using the Q-V technique to evaluate silicon-silicon dioxide interface states. Background to the study; Description of the system setup; Evaluation of the experimental results.

  • Reaction of S[sub 2] and SO[sub 2] with Pd/Rh(111) surfaces: Effects of metal-metal bonding on... Rodriguez, Jose A.; Jirsak, Tomas; Chaturvedi, Sanjay // Journal of Chemical Physics;2/8/1999, Vol. 110 Issue 6, p3138 

    Studies the surface chemistry of S[sub 2] and SO[sub 2] on Rh(111), Pd/Rh(111) and polycrystalline Pd using synchrotron-based high-resolution photoemission and ab initio self-consistent-field calculations. Reduction in the density of states near the Fermi level of Pd/Rh(111) surfaces induced by...

  • SiO2 and Si3N4 passivation layers on Y-Ba-Cu-O thin films. Jia, Q. X.; Anderson, W. A. // Journal of Applied Physics;7/1/1989, Vol. 66 Issue 1, p452 

    Examines silicon dioxide and silicon nitride passivation layers on yttrium barium copper oxide superconductor thin films. Thermal evaporation of silicon dioxide on the film's surface; Information on the zero resistance temperature of yttrium barium copper oxide films; Investigation on the...

  • Preparation of hydrogen separation membranes using disiloxane compounds. Hye Ryeon Lee; Kanezashi, Masakoto; Yoshioka, Tomohisa; Tsuru, Toshinori // Desalination & Water Treatment;May2010, Vol. 17 Issue 1-3, p120 

    Hybrid silica membranes were prepared using 1,1,3,3-tetraethoxy-1,3-dimethyldisiloxane (TEDMDS) as a silica precursor. Hybrid silica sol was synthesized by the acetic acid catalyzed hydrolysis and condensation of TEDMDS in ethanol as a solvent with different water molar ratio. Porous silica...

  • Experimental evidence of Si-H bond energy variation at SiO[sub 2]-Si interface. Cheng, Kangguo; Kangguo Cheng; Lee, Jinju; Jinju Lee; Lyding, Joseph W. // Applied Physics Letters;11/20/2000, Vol. 77 Issue 21 

    The threshold energy barrier for hydrogen desorption from the SiO[sub 2]-Si interface has been assumed to be the Si-H bond energy with the value of 3.6 eV. Based on the uniform Si-H bond energy and diffusion-limited degradation, the time-dependent hot-carrier degradation of...

  • Theoretical and spectroscopic studies of gap-states at ultrathin silicon oxide/silicon interfaces. Kubota, Tomohiro; Asano, Akira; Nishioka, Yasushiro; Kobayashi, Hikaru // Journal of Chemical Physics;11/1/1999, Vol. 111 Issue 17, p8136 

    Reports on results of theoretical and spectroscopic studies of gap-states of ultrathin silicon oxide/silicon interfaces using x-ray photoelectron spectroscopy measurements. Reason for the peaked structure of interface state spectra; Effective correlation energy of the silicon dangling bond...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics