Medium-energy sputtering of thin films: The approach to percolation

Papandreou, N.; Nedellec, P.; Rosenblatt, J.
February 1989
Applied Physics Letters;2/6/1989, Vol. 54 Issue 6, p537
Academic Journal
Thin Pd films are irradiated with 100 keV Xe ions and their resistance measured in situ. The evolution of resistance as a function of the fluence is found to display invariance properties, which lead to a characterization of the film structure and morphology. The calculations emphasize the role of two features of medium-energy sputtering: the thickness dependence of the sputtering yield and the applicability of Poisson statistics to the process of hole creation in the film.


Related Articles

  • Cumulative laser irradiation effects on ions in the plume of YBa[sub 2]Cu[sub 3]O[sub 7--delta].... Izumi, H.; Ohata, K.; Sawada, T.; Morishita, T.; Tanaka, S. // Applied Physics Letters;12/2/1991, Vol. 59 Issue 23, p2950 

    Reports the cumulative laser irradiation effects on ions in the plume of YBa[sub 2]Cu[sub 3]O[sub 7-delta] target at the film surface. Observation of the beginning of heavy species emission from the target; Formation of particulate at the film surface.

  • Catastrophic loss of superconductivity in ion-irradiated films of YBa2Cu3O7-δ. Chrisey, D. B.; Summers, G. P.; Maisch, W. G.; Burke, E. A.; Elam, W. T.; Herman, H.; Kirkland, J. P.; Neiser, R. A. // Applied Physics Letters;9/12/1988, Vol. 53 Issue 11, p1001 

    We have investigated the effects of low fluence (<10[sup 14] cm[sup -2]) 63 MeV H[sup +] and 65 MeV He[sup 2+] irradiation of prototype thin films of YBa[sub 2]Cu[sub 3]O[sub 7-δ] produced by a plasma-arc spray technique. The observed change in the resistance versus temperature behavior is...

  • Ion-beam adhesion effects in the Cu/sapphire interfacial system. Skinner, W. M. // Journal of Applied Physics;8/1/1993, Vol. 74 Issue 3, p1670 

    Presents a study that investigated the effects of hydrogen, boron, oxygen and gold ion irradiation on the adhesion energy of thin copper films deposited on sapphire. Measurement of the adhesion energy; Observation of the resultant laterally segregated copper particle shape after vacuum...

  • Effects of ion irradiation on the residual stresses in Cr thin films. Misra, A.; Fayeulle, S.; Kung, H.; Mitchell, T. E.; Nastasi, M. // Applied Physics Letters;8/17/1998, Vol. 73 Issue 7 

    Cr films sputtered onto {100} Si substrates at room temperature were found to be under residual tension, as revealed by wafer curvature measurements. A 150 nm thick Cr film was bombarded with 300 keV Ar ions after deposition. The intrinsic residual tensile stress increased slightly and then...

  • Disorder accumulation and recovery in gold-ion irradiated 3C-SiC. Jiang, W.; Weber, W. J.; Lian, J.; Kalkhoran, N. M. // Journal of Applied Physics;Jan2009, Vol. 105 Issue 1, p013529 

    A single-crystal 3C-SiC film on a Si/SiO2/Si (separation by implantation of oxygen ) substrate was irradiated in different areas at 156 K with Au2+ ions to low fluences. The disorder profiles as a function of dose on both the Si and C sublattices have been determined in situ using a combination...

  • Controlling the size distribution of embedded Au nanoparticles using ion irradiation. Ramjauny, Y.; Rizza, G.; Perruchas, S.; Gacoin, T.; Botha, R. // Journal of Applied Physics;Jun2010, Vol. 107 Issue 10, p104303 

    Samples composted of chemically synthesized Au nanoparticles (NPs) (16.0±2.0 nm) embedded within a planar silica film are used as model system to investigate the evolution of a second phase under irradiation when the temperature and the ion stopping power are changed. Samples are irradiated...

  • Smoothening of internal phase boundaries by ion bombardment. Petersen, J.; Mayr, S. G. // Journal of Applied Physics;8/1/2005, Vol. 98 Issue 3, p033536 

    The impact of heavy-ion irradiation on the morphology of bilayers, which are composed of two immiscible metals, is investigated with the help of experiments and molecular-dynamics computer simulations. Using the model system Ag/Ni, our main focus lies on the interface roughness of the Ag/Ni...

  • A monitor for heavy ion flux density control based on detection of recoil protons during irradiation of polymer films. Teterev, Yu. G.; Gikal, B. N.; Ivanov, O. M.; Kononenko, G. A.; Mironov, V. I. // Instruments & Experimental Techniques;Mar2009, Vol. 52 Issue 2, p159 

    An monitor for control of accelerated particle flux density used in irradiation of polymer films with heavy ions with a low track density (103−5 × 107 cm−2) is based on detection of recoil protons. It has been designed to control irradiation of a film with a width of up to 650 mm...

  • Simulating percolating behavior of conductive particles in anisotropically conductive composite films. Lu, S.Y.; Lin, C.Y. // Applied Physics A: Materials Science & Processing;2002, Vol. 74 Issue 5, p675 

    A numerical scheme is developed to simulate the percolating behavior of conductive particles within a non-conductive matrix film with a preferential alignment of particles achieved via externally imposed deterministic driving forces. The sharp transition from non-conducting to conducting of the...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics