Elastic properties of silicon oxynitride films determined by picosecond acoustics

Grahn, H. T.; Maris, H. J.; Tauc, J.; Hatton, K. S.
December 1988
Applied Physics Letters;12/5/1988, Vol. 53 Issue 23, p2281
Academic Journal
The sound velocity and elastic modulus of a series of amorphous silicon oxynitride films produced by reactive sputtering have been measured as a function of nitrogen content. The acoustic pulses were generated and detected with ultrashort light pulses. The sound velocity was found to depend linearly on the nitrogen content.


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