Direct writing of 10 nm features with the scanning tunneling microscope

Ehrichs, E. E.; Yoon, S.; de Lozanne, A. L.
December 1988
Applied Physics Letters;12/5/1988, Vol. 53 Issue 23, p2287
Academic Journal
A scanning tunneling microscope (STM) has been used to write metallic lines and carbon lines with linewidths as small as 10 nm. Organometallic gases or surface organic contamination can be decomposed to deposit these lines in a single step. Computer control of the STM allows precise patterning of these lines on a silicon substrate.


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