Dense plasma production for high rate sputtering by means of an electric mirror

Matsuoka, Morito; Ono, Ken’ichi
November 1988
Applied Physics Letters;11/21/1988, Vol. 53 Issue 21, p2025
Academic Journal
The production of a new dense plasma for high rate sputtering with an electric mirror has been achieved. The plasma, with a density over 1012 cm-3 , is generated by an oscillating electron beam between two targets. Microwave excitation is detected from the dense plasma. Nonlinear interaction between the electron beam and the plasma plays an important role in increasing plasma density. The high film deposition rates over 3000 Ã…/min for Al have been realized.


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