Measurements of F*, CF, and CF2 formation and decay in pulsed fluorocarbon discharges

Hansen, S. G.; Luckman, G.; Colson, Steven D.
October 1988
Applied Physics Letters;10/24/1988, Vol. 53 Issue 17, p1588
Academic Journal
The temporal population profiles of F*, CF, and CF2 in a sharp-edged, pulsed (500 μs), fluorocarbon discharge are examined. F* population rises and falls with the discharge current suggesting that electron impact of the parent fluorocarbon is the primary source of emitting fluorine atoms. Ground-state CF and CF2, monitored by laser-induced fluorescence, show noticeably slower formation and decay, but a simple kinetic model assuming that each arises from direct electron impact of the parent gas fits the data. It is shown that CF can be conveniently monitored by exciting the B(v’=2)-X(v‘=0) transition with a 193 nm ArF excimer laser.


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