TITLE

Gel behavior of keV ion irradiated polystyrene

AUTHOR(S)
Calcagno, L.; Foti, G.; Licciardello, A.; Puglisi, O.
PUB. DATE
October 1988
SOURCE
Applied Physics Letters;10/17/1988, Vol. 53 Issue 16, p1495
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Among the chemical and physical modifications induced by ion bombardment of polymers, the solubility changes are very important because of technological application for lithography in microelectronic devices. Solubility changes due to the occurrence of crosslinkings have been followed on monodisperse and polydisperse polystyrene after ion irradiations (1011–1014 ions/cm2, keV energy). By using the Inokuty gel theory [M. Inokuti J. Appl. Phys. 38, 2999 (1963)], the chemical yield (crosslinking/eV) has been determined for different molecular weights and molecular weight distributions.
ACCESSION #
9828484

 

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