Effect of the post-deposition processing ambient on the preparation of superconducting YBa2Cu3O7-x coevaporated thin films using a BaF2 source

Chan, Siu-Wai; Bagley, B. G.; Greene, L. H.; Giroud, M.; Feldmann, W. L.; Jenkin, K. R.; Wilkins, B. J.
October 1988
Applied Physics Letters;10/10/1988, Vol. 53 Issue 15, p1443
Academic Journal
We have investigated the effect of the post-deposition processing ambient on the preparation of YBa2Cu3O7-x thin films from a BaF2 source. The role of H2O vapor during the high-temperature anneal is understood through a thermodynamic analysis of the fluorine removal reaction. The role of a HF getter (e.g., SiO2) is understood through the same type of analysis. We have demonstrated that a zero resistance transition temperature at 77 K can be obtained for an annealing temperature as low as 690 °C for films deposited on SrTiO3 substrates by increasing the PH2O and decreasing PHF during the high-temperature soak cycle.


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