TITLE

Photobias effect in laser-controlled etching of InP

AUTHOR(S)
Willner, A. E.; Podlesnik, D. V.; Gilgen, H. H.; Osgood, R. M.
PUB. DATE
September 1988
SOURCE
Applied Physics Letters;9/26/1988, Vol. 53 Issue 13, p1198
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We have investigated laser-assisted photochemical etching of InP in aqueous solutions without external electric fields. The process produces highly directional, high-aspect features with smooth vertical walls. Additionally, we demonstrate that the laser etching rate may be controlled externally by the application of a secondary light source.
ACCESSION #
9828202

 

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