Novel optical approach to atomic force microscopy

Meyer, Gerhard; Amer, Nabil M.
September 1988
Applied Physics Letters;9/19/1988, Vol. 53 Issue 12, p1045
Academic Journal
A sensitive and simple optical method for detecting the cantilever deflection in atomic force microscopy is described. The method was incorporated in an atomic force microscope, and imaging and force measurements, in ultrahigh vacuum, were successfully performed.


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