Growth, patterning, and weak-link fabrication of superconducting YBa2Cu3O7-x thin films

Hilton, G. C.; Harris, E. B.; Van Harlingen, D. J.
September 1988
Applied Physics Letters;9/19/1988, Vol. 53 Issue 12, p1107
Academic Journal
We have grown thin films of the high-temperature superconducting ceramic oxides and investigated techniques for fabricating weak-link structures. Films of YBa2Cu3O7-x grown on SrTiO3 by a combination of dc magnetron sputtering and thermal evaporation from the three sources have been patterned into microbridges with widths down to 2 μm. We find evidence that the bridges behave as arrays of Josephson-coupled superconducting islands. Further weak-link behavior is induced by in situ modification of the coupling by ion milling through the bridge.


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