Infrared spectroscopy of Si(111) surfaces after HF treatment: Hydrogen termination and surface morphology

Burrows, V. A.; Chabal, Y. J.; Higashi, G. S.; Raghavachari, K.; Christman, S. B.
September 1988
Applied Physics Letters;9/12/1988, Vol. 53 Issue 11, p998
Academic Journal
Polarized interred reflection spectroscopy has been used to characterize HF-treated Si(111) surfaces. The silicon-hydrogen stretching vibrations indicate that the surface is well ordered, but is microscopically rough, with coupled monohydride, dihydride, and trihydride termination.


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