In situ observation on electron-beam-induced chemical vapor deposition by transmission electron microscopy

Matsui, Shinji; Ichihashi, Toshinari
September 1988
Applied Physics Letters;9/5/1988, Vol. 53 Issue 10, p842
Academic Journal
W deposition, using a WF6 source and electron-beam-induced surface reaction, has been studied by transmission electron microscopy (TEM). The initial growth process has been observed in situ by TEM. As a result, it became clear that β-W clusters are formed by electron beam irradiation of the WF6 adlayer. Moreover, it has been observed that W layers are formed by coalescing the W clusters by electron beam irradiation at 5×10-7 Torr WF6 gas pressure. Furthermore, a nanostructure involving a W rod with 15 nm diameter has been demonstrated by using electron-beam-induced surface reaction.


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