Superconducting Bi-Sr-Ca-Cu-O films by magnetron sputtering of single Bi2O3-SrF2-CaF2-CuO targets

Levinson, M.; Shah, S. S. P.; Naito, N.
September 1988
Applied Physics Letters;9/5/1988, Vol. 53 Issue 10, p922
Academic Journal
Superconducting Bi-Sr-Ca-Cu-O films have been fabricated by rf magnetron sputtering using single mixed Bi2O3-SrF2-CaF2-CuO targets. Uniform, reproducible films were formed on SrTiO3 substrates with zero resistance as high as 78 K. Grain morphology and orientation were affected by annealing temperature and the F content of the films. The final films showed excellent environmental and mechanical stability.


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