TITLE

Low-temperature preparation of superconducting YBa2Cu3O7-δ films on Si, MgO, and SrTiO3 by thermal coevaporation

AUTHOR(S)
Berberich, P.; Tate, J.; Dietsche, W.; Kinder, H.
PUB. DATE
September 1988
SOURCE
Applied Physics Letters;9/5/1988, Vol. 53 Issue 10, p925
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
We used simple thermal coevaporation of yttrium, barium, and copper in an oxygen atmosphere to produce thin films of the 90 K superconductor, YBa2Cu3O7-δ, on silicon, magnesium oxide, and strontium titanate. The films were deposited on 650 °C substrates and were superconducting when removed from the evaporator. A short post-anneal at 480 °C produced films on bare Si with transition temperatures (R=0) of 85 K. Films as thin as 0.13 μm, superconducting at 91 K (on MgO) and 89 K (on SrTiO3), were obtained with no post-anneal.
ACCESSION #
9827942

 

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