Ion beam patterning of spin-on metalorganic precursors and formation of high Tc superconductors

Gross, M. E.; Brown, W. L.; DiCenzo, S. B.; Hartford, E. H.; Yeh, J. J.; Hong, M.
August 1988
Applied Physics Letters;8/29/1988, Vol. 53 Issue 9, p802
Academic Journal
A new technique using ion beams to produce patterned thin films of the high-temperature perovskite superconductor YBa2Cu3O7-x from spin-on metalorganic precursors is described. Spin-coated precursor films are irradiated through a stencil mask with 2.5 MeV He+ ions, developed in solvent to remove unexposed material, and the remaining patterns are pyrolyzed. Black films of YBa2Cu3O7-x with pattern dimensions on the millimeter scale exhibit orientation with the c axis perpendicular to the film after heat treatments of 990 °C for 3 min. The conductivity of a highly oriented, ∼0.4-μm-thick patterned film is characterized by onset of the superconducting transition at 84 K and zero resistivity at 68 K, similar to those of an unirradiated film given the same thermal treatment. Studies on the nature of the ion beam exposed material are discussed.


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