TITLE

Ion beam patterning of spin-on metalorganic precursors and formation of high Tc superconductors

AUTHOR(S)
Gross, M. E.; Brown, W. L.; DiCenzo, S. B.; Hartford, E. H.; Yeh, J. J.; Hong, M.
PUB. DATE
August 1988
SOURCE
Applied Physics Letters;8/29/1988, Vol. 53 Issue 9, p802
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
A new technique using ion beams to produce patterned thin films of the high-temperature perovskite superconductor YBa2Cu3O7-x from spin-on metalorganic precursors is described. Spin-coated precursor films are irradiated through a stencil mask with 2.5 MeV He+ ions, developed in solvent to remove unexposed material, and the remaining patterns are pyrolyzed. Black films of YBa2Cu3O7-x with pattern dimensions on the millimeter scale exhibit orientation with the c axis perpendicular to the film after heat treatments of 990 °C for 3 min. The conductivity of a highly oriented, ∼0.4-μm-thick patterned film is characterized by onset of the superconducting transition at 84 K and zero resistivity at 68 K, similar to those of an unirradiated film given the same thermal treatment. Studies on the nature of the ion beam exposed material are discussed.
ACCESSION #
9827872

 

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