Fast photolytic laser writing of gold lines on a prenucleated substrate

Beeson, K. W.; Clements, N. S.
August 1988
Applied Physics Letters;8/15/1988, Vol. 53 Issue 7, p547
Academic Journal
Laser written gold lines with resistivities as low as 4.5 μΩ cm and writing speeds up to 2.5 mm/s have been achieved by photolytic decomposition of gold metallopolymer thin films on alumina substrates prenucleated with a very thin (∼20 Å) nonconducting layer of sputtered gold. Laser writing is done at 257 nm with a frequency-doubled Ar+ laser and is followed by a subsequent annealing step at 250 °C for 30–200 min to produce conducting lines.


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