TITLE

Use of electron beam lithography to selectively decompose metalorganics into patterned thin-film superconductors

AUTHOR(S)
Mantese, J. V.; Catalan, A. B.; Hamdi, A. H.; Micheli, A. L.; Studer-Rabeler, K.
PUB. DATE
August 1988
SOURCE
Applied Physics Letters;8/8/1988, Vol. 53 Issue 6, p526
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Fine line superconductors, approximately 5 μm in width and 260 nm thick, were formed from Y-Ba-Cu on <100>SrTiO3 by the combined methods of metalorganic deposition and selective area electron beam exposure. The lines were written in metal neodecanoates using an electron beam having a spot size of 0.25 μm and an energy of 25 kV. The dosage of the exposure was 1200 μC/cm2. Unexposed areas were removed with a 30 s xylene wash. A 500 °C pyrolysis in air for 300 s followed by rapid thermal annealing in oxygen produced lines having superconducting onsets above 90 K and zero resistance at 69 K.
ACCESSION #
9827653

 

Related Articles

  • Thin-film YBaCuO superconductors formed by Cu/BaO/Y2O3 layer structures. Chang, Chin-An; Tsuei, C. C.; Chi, C. C.; McGuire, T. R. // Applied Physics Letters;1/4/88, Vol. 52 Issue 1, p72 

    Thin-film superconductors of the YBaCuO family have been formed using layer structures of Cu, BaO, and Y2O3 deposited on different substrates by electron beam evaporation. Using a thickness ratio of Cu, BaO, and Y2O3 layers off that of the stoichiometric YBa2Cu3O7 phase, superconducting films...

  • Electron beam flash evaporation for YBaCuO and BiCaSrCuO thin films. Davis, Matthew F.; Wosik, Jaroslaw L.; Wolfe, J. C. // Journal of Applied Physics;11/15/1989, Vol. 66 Issue 10, p4903 

    Focuses on a study which described an electron beam flash evaporation technique for superconducting thin films. Information on the superconducting thin films; Methodology of the study; Results and discussion.

  • As-deposited superconducting Y-Ba-Cu-O thin films on Si, Al2O3, and SrTiO3 substrates. Silver, R. M.; Berezin, A. B.; Wendman, M.; de Lozanne, A. L. // Applied Physics Letters;6/20/1988, Vol. 52 Issue 25, p2174 

    We have developed an electron beam evaporator designed to deal with the special requirements of thin films of oxide superconductors. The growing surface is sprayed with plasma-excited oxygen while the sources and rate monitors operate in a low background pressure. This allows us to reproducibly...

  • Preparation of superconducting Bi-Sr-Ca-Cu-O thin films by sequential electron beam evaporation and oxygen annealing. Steinbeck, J.; Tsaur, B-Y.; Anderson, A. C.; Strauss, A. J. // Applied Physics Letters;1/30/1989, Vol. 54 Issue 5, p466 

    Superconducting films with nominal composition Bi2Sr2Ca1Cu2Ox have been prepared on <100> MgO substrates by sequential electron beam evaporation of Cu, Bi, and Sr2/3 Ca1/3 F2, followed by annealing in flowing wet, then dry, O2. X-ray diffraction data show that the films contain the two...

  • YBa[sub 2]Cu[sub 3]O[sub 7] nanobridges fabricated by direct-write electron beam lithography. Wendt, J.R.; Martens, J.S. // Applied Physics Letters;9/28/1992, Vol. 61 Issue 13, p1597 

    Presents a direct method for nondamaging, nanometer-scale patterning of high T[sub c] superconductor thin films. Use of direct-write electron beam lithography in fabricating superconducting nanobridges; Range of critical currents exhibited by functional junctions; Dependence of the critical...

  • Intrinsic thermal stability for scanning electron microscopy of thin-film superconductors. Flik, M. I.; Tien, C. L. // Journal of Applied Physics;1/1/1990, Vol. 67 Issue 1, p362 

    Focuses on the intrinsic thermal stability (ITS) for scanning electron microscopy of thin-film superconductors. Criterion for the ITS of thin-film superconductors; Analysis of the temperature field; Details of the thermal modeling of electron-beam absorption.

  • Characterization of Y-Ba-Cu-O thin films using their nonlinear magnetic response. Shaulov, A.; Bhargava, R.; Shatz, S. // Journal of Applied Physics;5/1/1991, Vol. 69 Issue 9, p6738 

    Discusses a study that utilized the measurement of the third harmonic component in the asynchronous circuits magnetic response to investigate the multiphase nature of yttrium-barium-copper-oxygen thin films. Factors exhibited by films prepared by electron beam evaporation; Usefulness of third...

  • Vacant Electron State Manifestations in the Electron-Beam-Induced Current Spectra of Macromolecular Films. Komolov, S. A.; Gerasimova, N. B.; Sidorenko, A. G.; Alyaev, Yu. G. // Technical Physics Letters;Dec2000, Vol. 26 Issue 12, p1110 

    The vacuum-deposited films of corbatin (CRB) and perylene tetracarboxy dianhydride (PTCDA) were studied in situ by method of total electron-beam-induced current (EBIC) spectroscopy. The results are interpreted within the framework of the model of vacant electron states (VES) above the energy...

  • Direct fabrication of microrelief patterns by electron-beam exposure in Ag-As-S glasses. Toshida, Norimitsu; Tanaka, Keiji // Applied Physics Letters;2/10/1997, Vol. 70 Issue 6, p779 

    Examines the direct fabrication of microrelief patterns by electron-beam exposure in silver-arsenic-silicon (Ag-As-S) thin films. Production of convex relief patterns in Ag-As-S glasses; Details on the lateral size and height of the patterns; Factors contributing to volume expansion.

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics