Superconducting Y1Ba2Cu3O7-x films on Si

Venkatesan, T.; Chase, E. W.; Wu, X. D.; Inam, A.; Chang, C. C.; Shokoohi, F. K.
July 1988
Applied Physics Letters;7/18/1988, Vol. 53 Issue 3, p243
Academic Journal
By depositing YBaCuO films at low substrate holder temperatures (600 °C) using a pulsed laser, films with the orthorhombic phase exhibiting superconductivity with high zero resistance temperatures (Tc0) were produced. Tc0 values as high as 50 and 80 K were seen on films deposited directly on Si and on Si with only a 50 nm ZrO2 buffer layer, respectively. The key to the successful film deposition is the low processing temperatures involved, which minimized the interface reactions as observed by Auger electron spectrometry.


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