Preparation of superconducting thin films of bismuth strontium calcium copper oxides by reactive sputtering

Face, D. W.; Neal, M. J.; Matthiesen, M. M.; Kucera, J. T.; Crain, J.; Graybeal, J. M.; Orlando, T. P.; Rudman, D. A.
July 1988
Applied Physics Letters;7/18/1988, Vol. 53 Issue 3, p246
Academic Journal
Superconducting thin films of Bi-Sr-Ca-Cu-oxides have been reproducibly prepared by reactive magnetically enhanced triode sputtering using three separate metal targets (Sr, Ca, and Cu-Bi). Oxygen was introduced directly at the substrates during film growth. The films were deposited on ambient temperature substrates [Al2O3, SrTiO3, and yttria-stabilized zirconia (YSZ)] and had thicknesses of 0.5–1.5 μm. After deposition, the films were annealed at 850–900 °C in flowing oxygen. The electrical resistance of the best films on YSZ decreased approximately linearly with temperature until the onset of superconductivity at about 85 K. Zero resistance was achieved by 74 K. Critical current densities in excess of 5×105 A/cm2 at 4.2 K were also obtained. X-ray diffraction demonstrated that the best films were nearly single phase (Bi2Sr2Ca1Cu2O8+x) and textured with the c axis perpendicular to the substrate. The effect of composition and annealing on our results is discussed.


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