TITLE

Laser-assisted chemical etching of copper

AUTHOR(S)
Ritsko, J. J.; Ho, F.; Hurst, J.
PUB. DATE
July 1988
SOURCE
Applied Physics Letters;7/4/1988, Vol. 53 Issue 1, p78
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Copper films several microns thick can be rapidly etched (0.1–0.5 μm/s) in a chlorine atmosphere using 308 nm pulsed excimer laser radiation. Etch rates exhibit a practical threshold of ∼0.1 J/cm2 and saturate above 0.3 J/cm2. The etching mechanism involves reaction of copper and chlorine in the time between the laser pulses to form a nonstoichiometric chloride which is thermally ablated by the laser. Photochemical effects appear to be unimportant. The etch rate increases roughly as the square root of the laser pulse rate, suggesting that reactive diffusion is a limiting factor. As the substrate temperature increases, the etch rate rises, then falls, indicating the competition of processes such as adsorption, desorption, and reaction of chlorine molecules on copper chloride surfaces. A simple model based on chemical kinetics suggests that the copper-chlorine reaction at pressures above 0.1 Torr is controlled by a physisorbed intermediate state.
ACCESSION #
9827286

 

Related Articles

  • Enhancing the 10.6 μm absorptivity of copper and aluminum using excimer laser radiation. Kinsman, G.; Duley, W. W. // Applied Physics Letters;1/2/1989, Vol. 54 Issue 1, p7 

    Increasing absorption of 10.6 μm laser radiation by Cu and Al surfaces pretreated with excimer laser pulses has been measured. The effective coupling is shown to approach 100% under certain irradiation conditions. This increased absorption arises from a combination of excimer roughening and...

  • Expanding beam concept for building very large excimer laser amplifiers. Jacob, J. H.; Rokni, M.; Klinkowstein, R. E.; Singer, S. // Applied Physics Letters;2/3/1986, Vol. 48 Issue 5, p318 

    Optical extraction efficiency from conventional lasers and amplifiers with nonsaturable intrinsic absorption is substantially below the maximum efficiency at absorption length products exceeding unity. This result is caused by the fact that high intensities in the amplifier cause saturation of...

  • Effect of the excimer laser irradiation on sol-gel derived tungsten-titanium dioxide thin films. Joya, Yasir; Liu, Zhu // Applied Physics A: Materials Science & Processing;Jan2011, Vol. 102 Issue 1, p91 

    novel technique based on the excimer laser induced crystallization and modification of TiO thin films is being reported. W ions loaded TiO (WTO) precursor films were prepared by a modified sol-gel method and spin-coated onto microscopic glass slides. Pulsed KrF (248 nm, 13 ns) excimer laser was...

  • Two-photon dissociation of HgBr[sub 2] as passive mode locking mechanism of a long-pulse XeCl excimer laser. Efthimiopoulos, T.; Zigos, D. // Applied Physics B: Lasers & Optics;2002, Vol. 75 Issue 4/5, p515 

    Results are presented related to the use of twophoton dissociation of HgBr[sub 2] molecular vapor as a non-linear fast-opening passive mode locker of a long-pulse XeC1 laser. A dye solution, with or without scatterers, is also examined for comparison. Pulses with durations below our resolution...

  • Interferometric measurement of substrate heating induced by pulsed laser irradiation. Saenger, K. L. // Journal of Applied Physics;4/15/1988, Vol. 63 Issue 8, p2522 

    Deals with a study which demonstrated a simple interferometric technique for the study of radiation induced transient heating for the specific case of a glass substrate irradiated with pulsed 193-nm excimer laser radiation. Experimental details; Results and discussion.

  • Interaction of laser radiation with TNT with respect to the laser neutralisation of AP mines. Rothacher, T.; Lüthy, W.; Weber, H.P. // Applied Physics A: Materials Science & Processing;2001, Vol. 73 Issue 2, p133 

    According to UN estimations there are between 80 and 115 million activated landmines worldwide. These mines, or other unexploded ordnance (UXO), can be triggered accidentally and kill or injure more than 2000 civilians per month. The most common explosive in these mines is trinitrotoluene (TNT)....

  • Recording grooves for fiber-chip coupling in PMMA using KrF excimer laser radiation: experiment and simulation. Sterkenburgh, T.; Franke, H.; Becker, M.; Garen, M.; Frank, W.F.X. // Applied Physics B: Lasers & Optics;1999, Vol. 68 Issue 5, p1061 

    Abstract. The fabrication of deep grooves with a high aspect ratio in poly-methylmethacrylate using excimer laser radiation (248 nm) and a cylindric lens has been investigated. The form of the grooves and their dimensions are evaluated with respect to the recording parameters. The patterns and...

  • Performance of optical fibers for transmission of high-peak-power XeCl excimer laser pulses. Delmdahl, R.F.; Spiecker, G.; Dietz, H.; Rutting, M.; Hillrichs, G.; Klein, K.-F. // Applied Physics B: Lasers & Optics;Oct2003, Vol. 77 Issue 4, p441 

    Demonstrates the performance of optical fibers for transmission of high-peak-power XeCl excimer laser pulses. Output energy of the XeCl excimer laser; Fiber delivery; Dependence of the fiber delivery performance on the repetition rate of the transmitted laser pulses.

  • Photoresonant ionization of gaseous media by excimer laser radiation. Knyazev, B. A.; Mel’nikov, P. I.; Blyum, G.; Doroshkin, A. A.; Matveenko, A. N. // Technical Physics Letters;May99, Vol. 23 Issue 5, p343 

    An identification is made of twenty five elements whose resonance lines overlap the emission lines of high-power pulsed ultraviolet gas lasers or lie in the immediate vicinity of them, so that the mechanism laser ionization based on resonance saturation (LIBORS) can be used to ionize the vapor...

Share

Read the Article

Courtesy of THE LIBRARY OF VIRGINIA

Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics