Submillimeter high brightness pulsed x-ray source

Lau, J. H. W.; Kekez, M. M.; Lougheed, G. D.; Gupta, R. P.
June 1988
Applied Physics Letters;6/20/1988, Vol. 52 Issue 25, p2111
Academic Journal
By inducing an electrical discharge in an annular gas plenum connected to a vacuum diode by a narrow annular slit, we demonstrate that microgram preionized plasma liners can be formed and imploded by a dc charged Blumlein pulser to efficiently convert electrical energy into soft x rays. The submillimeter x-ray source can in principle be scaled to the high repetition rate needed for x-ray lithography. In a proof of principle experiment, we have observed using krypton up to 0.5, 20, and 100 J of x-ray output above 1.5 keV, 500 eV, and 150 eV photon energies, respectively.


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