Discharge interruption induced by an ArF laser in a C2H3Cl/CF4/CH4 mixture

Sasagawa, Teruo; Kawahara, Akihiro; Obara, Minoru
June 1988
Applied Physics Letters;6/20/1988, Vol. 52 Issue 25, p2114
Academic Journal
We have successfully demonstrated discharge interruption induced by ArF laser irradiation in a discharge medium of C2H3Cl/CF4/CH4, using a hollow cathode type discharge tube. With a mixture of C2H3Cl/CF4/CH4 (1.8 Torr of CH4 with 0.7% of C2H3Cl and 10% of CF4), a discharge current of 1 mA (0.14 mA/cm2), and after laser irradiation of 27 mJ/cm2 (10 ns full width at half-maximum), first a discharge current peak appeared and then the discharge current was decreased rapidly with a current decay time constant of 1.0 μs. A corresponding discharge current decay rate (dI/dt) of 1 kA/s was obtained. The discharge interruption condition was limited by the gas mixture and the total pressure. Moreover, dependences of dI/dt and the time constant (τ) on both laser fluence and discharge current were observed.


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