TITLE

Plasma emission from laser ablation of the high-temperature superconductor YBa2Cu3O7

AUTHOR(S)
Weimer, Wayne A.
PUB. DATE
June 1988
SOURCE
Applied Physics Letters;6/20/1988, Vol. 52 Issue 25, p2171
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Emission spectra generated during the excimer laser ablation of the high-temperature superconductor YBa2Cu3O7 at 193 nm are presented. The feasibility of using this emission as a signal source for a thin-film deposition process monitor is discussed. Results indicate the formation of a partially ionized plasma above the target surface.
ACCESSION #
9827160

 

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