Comment on ‘‘Current-density profiles for a Ga+ ion microprobe and their lithographic implications’’ [Appl. Phys. Lett. 51, 1960 (1987)]

Kubena, R. L.; Ward, J. W.
June 1988
Applied Physics Letters;6/13/1988, Vol. 52 Issue 24, p2089
Academic Journal
Comments on the paper 'Current-Density Profiles for a Ga[sup +] Ion Microprobe and Their Lithographic Implications.' Measurements of the current-density profiles of Ga[sup +] ion microprobe versus system magnification and ion source current; Measurement of long exponential tails; Interpretation of the results on the basis of chromatic aberration and the blurring of the virtual ion source.


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