Plasma polymerization for high Tc oxide superconductors

Morohashi, Shin’ichi; Tamura, Hirotaka; Yoshida, Akira; Hasuo, Shinya
May 1988
Applied Physics Letters;5/30/1988, Vol. 52 Issue 22, p1897
Academic Journal
Plasma polymerization using CHF3 gas, which prevents the degradation of high Tc oxide superconductors due to moisture and annealing, was developed. The resistive transitions of Y1Ba2Cu3Ox thin films, coated by plasma polymerization, did not change before and after soaking in 20 °C water for 60 min. In addition, the critical temperature of those films was unchanged after annealing at 200 °C for 30 min in air, and then soaking in 90 °C water for 10 min. We confirmed that the polymer film grown by this method was dense, and the Y1Ba2Cu3Ox film reacted with the fluorine at the interface using x-ray photoelectron spectroscopy.


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