Laser evaporation deposition of superconducting and dielectric thin films

Kwok, H. S.; Mattocks, P.; Shi, L.; Wang, X. W.; Witanachchi, S.; Ying, Q. Y.; Zheng, J. P.; Shaw, D. T.
May 1988
Applied Physics Letters;5/23/1988, Vol. 52 Issue 21, p1825
Academic Journal
We describe here the deposition of superconducting and dielectric thin films by the laser evaporation technique. The characterization of this process, and possible optimization with regards to wavelength and pulse duration of the laser will be discussed.


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