Metalorganic molecular beam epitaxy of γ-Al2O3 films on Si at low growth temperatures

Sawada, Kazuaki; Ishida, Makoto; Nakamura, Tetsuro; Ohtake, Norio
May 1988
Applied Physics Letters;5/16/1988, Vol. 52 Issue 20, p1672
Academic Journal
Heteroepitaxial growth of γ-Al2O3 films was performed successfully onto (100) and (111) Si substrates at low substrate temperatures between 720 and 800 °C by metalorganic molecular beam epitaxy using N2 bubbled Al(CH3)3 and N2O. Using in situ reflection high-energy electron diffraction, the orientation relationships between epitaxial γ-Al2O3 films and Si substrates were found to be (100) γ-Al2O3//(100) Si with [110] γ-Al2O3//[110] Si and (111) γ-Al2O3//(111) Si with [112] γ-Al2O3//[112] Si. The stoichiometry of the grown films was found similar to that of Al2O3 from Auger signals.


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