Y-Ba-Cu-O films by rf magnetron sputtering using single composite targets: Superconducting and structural properties

Liou, S. H.; Hong, M.; Kwo, J.; Davidson, B. A.; Chen, H. S.; Nakahara, S.; Boone, T.; Felder, R. J.
May 1988
Applied Physics Letters;5/16/1988, Vol. 52 Issue 20, p1735
Academic Journal
High Tc superconducting Y-Ba-Cu-O films have been produced by rf magnetron sputtering using single unreacted composite targets of Y2O3, BaF2, and CuO powders. Transport measurements of the films showed a sharp resistive Tc (R=0) at 89 K and a metallic behavior of resistivity versus temperature. The films show preferred orientations when deposited on single-crystal SrTiO3 substrates (100) or (110) and followed by a post O2 annealing at 825 °C.


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