Thickness dependence of superconductivity in rf-sputtered Y-Ba-Cu-O thin films

Akoh, H.; Shinoki, F.; Takahashi, M.; Takada, S.
May 1988
Applied Physics Letters;5/16/1988, Vol. 52 Issue 20, p1732
Academic Journal
Y-Ba-Cu-O thin films (100–730 nm) with small grains and a smooth surface have been fabricated by rf diode sputtering. The values of transition temperature Tc and critical current density Jc for the film (730 nm thickness) on SrTiO3 are 65 K and 1.2×105 A/cm2 at 4.2 K, respectively. The thickness dependence of Tc and Jc for the patterned films shows that Tc and Jc are almost constant for films with a thickness d≥200 nm.


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